Non-volatile memory device and method of fabricating the same

ABSTRACT

A method of fabricating an a non-volatile memory includes forming trench isolation regions in an inactive region of a semiconductor substrate, adjacent trench isolation regions defining respective protrusions having rounded edges therebetween, wherein upper surfaces of the trench isolation regions are lower than an upper surface of the semiconductor substrate and wherein the protrusions define an active region, forming a tunnel insulating layer covering the protrusion of the semiconductor substrate, and forming, sequentially, a storage layer, a blocking insulating layer, and a gate layer covering the tunnel insulating layer.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation application of U.S. application Ser.No. 11/149,396 filed on Jun. 9, 2005, the disclosure of which is hereinincorporated by reference in its entirety.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a non-volatile memory device in whichstored data is maintained without a power supply and a method offabricating the same, and more particularly, to an electrically erasableprogrammable read-only memory (hereinafter, referred to as ‘EEPROM’) anda method of fabricating the same.

2. Description of Related Art

Electrically erasable programmable non-volatile memory comes indifferent types, for example, EEPROM of a floating gate type, ametal-nitride-oxide-silicon (MNOS) type, ametal-oxide-nitride-oxide-silicon (MONOS) type, and asilicon-oxide-nitride-oxide-silicon (SONOS) type.

An example of a SONOS-type EEPROM is illustrated in FIGS. 1 and 2. FIGS.1 and 2 are cross-sectional views of the SONOS-type EEPROM, shown alonga bit line and a gate, respectively.

Referring to FIGS. 1 and 2, the SONOS-type EEPROM has a stackedstructure comprising a lower oxide layer 20, a nitride layer 30, anupper oxide layer 40, and a polysilicon layer 50. The lower oxide layer20 is a tunnel oxide layer, the nitride layer 30 is a memory (storage)layer, and the upper oxide layer 40 is a blocking layer for preventingthe loss of a stored charge. The polysilicon layer 50 is a gate. Thelower oxide layer 20, the nitride layer 30, the upper oxide layer 40,and the polysilicon layer 50 are sequentially formed on a substrate 10in which isolation regions 15 are formed. Source/drain regions 60 areformed at both sides of the stacked structure in the substrate 10.

The SONOS-type EEPROM can be used in a compact semiconductor memory cellbecause it needs less voltage to program and erase than an EEPROM of thefloating gate type. To achieve a more highly integrated SONOS-typeEEPROM, the size of a memory cell needs to be reduced. As the size ofthe SONOS-type EEPROM is reduced, isolation of each memory cell becomesmore important. Thus, an area for isolation of each cell needs to besecured. The size of the area of isolation limits the size of an activearea in this case.

Therefore, a need exists for a memory cell having an enhanced activechannel region without increasing the size of a planar unit cell, and amethod for fabricating the same.

SUMMARY OF THE INVENTION

According to an embodiment of the present invention, a method offabricating an a non-volatile memory includes defining an active regionand an inactive region in a semiconductor substrate, forming trenchisolation regions in the inactive region for increasing an area of theactive region from an upper surface of a protrusion of the semiconductorsubstrate between the trench isolation regions to a side of theprotrusion, wherein upper surfaces of the trench isolation regions arelower than an upper surface of the semiconductor substrate, forming atunnel insulating layer on the protrusion of the semiconductorsubstrate, including the side of the protrusion, forming, sequentially,a storage layer, a blocking insulating layer, and a gate layer on thetunnel insulating layer, and rounding angular edges of the protrusionafter increasing the area of the active region, wherein the edges formedbetween the trench isolation regions and the protrusions remain angular.

According to an embodiment of the present invention, a method offabricating an a non-volatile memory includes forming trench isolationregions in an inactive region of a semiconductor substrate, adjacenttrench isolation regions defining respective protrusions having roundededges therebetween, wherein upper surfaces of the trench isolationregions are lower than an upper surface of the semiconductor substrateand wherein the protrusions define an active region, forming a tunnelinsulating layer covering the protrusion of the semiconductor substrate,and forming, sequentially, a storage layer, a blocking insulating layer,and a gate layer covering the tunnel insulating layer.

BRIEF DESCRIPTION OF THE DRAWINGS

The above features and advantages of the present invention will becomemore apparent by describing in detail preferred embodiments thereof withreference to the attached drawings in which:

FIGS. 1 and 2 are cross-sectional views of a conventional SONOS-typeEEPROM;

FIGS. 3 through 6 are cross-sectional views illustrating a method offabricating a SONOS-type EEPROM according to an embodiment of thepresent invention;

FIG. 7 is a magnified view of a portion B shown in FIG. 6; and

FIGS. 8 and 9 are cross-sectional views illustrating a method offabricating a SONOS-type EEPROM according to another embodiment of thepresent invention.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

The present invention will now be described more fully with reference tothe accompanying drawings, in which preferred embodiments of theinvention are shown. This invention may be embodied in different formsand should not be construed as being limited to the embodiments setforth herein. Rather, these embodiments are provided so that thisdisclosure will be thorough and complete and will fully convey theconcept of the invention to those skilled in the art. Characteristics,such as shape and thickness, of elements shown in the drawings may beexaggerated for clarity. The same reference numerals in differentdrawings represent the same elements, and thus their descriptions willnot be repeated.

FIGS. 3 through 6 are cross-sectional views illustrating a method offabricating a SONOS-type EEPROM according to an embodiment of thepresent invention. The cross-sectional views of the EEPROM are shownalong the direction of a gate.

Referring to FIG. 3, a semiconductor substrate 110 is provided, in whicha well (not shown) may be formed using ion implantation. Shallow trenchisolation (STI) regions 115 are formed in the semiconductor substrate110 to define active regions and inactive regions. The STI regions 115are formed in the inactive regions of the semiconductor substrate 110and are level with the upper surface of the semiconductor substrate 110.

To fabricate the STI regions 115, oxide and nitride layers are formed onthe semiconductor substrate 110. The oxide and nitride layers arepatterned to form openings where trenches are to be formed. The trenchesare formed to a depth of about 3000-6000 Å in the semiconductorsubstrate 110 with the patterned oxide and nitride layers being used asmasks. Insulating layers are formed to fill the trenches. For example,the trenches may be filled with insulating layers in the manner where(i) an oxide liner and/or a nitride liner is formed along the innerwalls of the trenches; (ii) a middle-temperature oxide (MTO) is formedon the liner; and (iii) a remaining portion of the trenches is filledwith a material having excellent gap filling characteristics, e.g.,undoped silicate glass (USG) or an oxide layer that is obtained usinghigh-density plasma chemical vapor deposition (HDP CVD). After thetrenches are filled, the upper surfaces of the insulating layers areplanarized using chemical mechanical polishing (CMP) or an etch backmethod. During planarization, the patterned nitride layer acts as a stopfor the CMP or the etch back method. The patterned oxide and nitridelayers left on the semiconductor substrate 110 are removed to obtain theSTI regions 115 whose upper surfaces are at the same height as, orslightly higher than, that of the semiconductor substrate 110.

Referring to FIG. 4, the STI regions 115 are etched to a predeterminedthickness forming recessed trench isolation regions 115 a, whose uppersurfaces are lower than the upper surface of the semiconductor substrate110. A protrusion of the semiconductor substrate 110 between the trenchisolation regions 115 a forms an active region. The active areacomprises the top and the sidewalls of the protrusion. Thus, accordingto the present invention, it is possible to increase the size of theactive region without changing the two-dimensional layout of the activeregion.

The STI region 115 may be etched with a hydrofluoric acid (HF) solutionusing wet etch back. The HF solution is obtained by mixing HF with H₂Oat a ratio of between about 1:10 and 1:1000 at room temperature. The STIregions 115 are dipped in the HF solution or the HF solution may besprayed onto the STI regions 115 so as to etch the STI regions 115 tothe predetermined thickness. Alternatively, a buffered oxide etchant(BOE), which is a mixture of HF and NH₄F, may be used in stead of the HFsolution. The isolation regions 115 a of a desired thickness can beobtained by appropriately increasing or reducing the time spent dippingthe STI regions 115 in the HF solution or BOE or spraying the HFsolution or BOE onto the STI regions 115.

Accordingly, the active region protrudes above the semiconductorsubstrate 110 and allows effective isolation of devices even if theisolation regions 115 a are thinner than a conventional field oxidelayer. The thickness of the isolation region 115 a can be increased ifneeded, given a recess of a certain depth, by increasing the depth ofthe trenches.

Referring to FIG. 5, a tunnel oxide layer 120 is formed to completelycover the isolation region 115 a and the protrusion of the semiconductorsubstrate 110. The tunnel oxide layer 120 is formed by thermallyoxidizing the resultant structure of FIG. 4. Alternatively, the tunneloxide layer 120 may be obtained by depositing a MTO on the resultantstructure of FIG. 4 using low-pressure CVD (LPCVD) and annealing theMTO. The annealing process is performed in a gas atmosphere comprisingN₂O and/or NO. However, for the as-deposited MTO, there is a higherprobability of surface defects such as silicon dangling bonds.Performing the annealing process under an atmosphere of N₂O and/or NOremoves such defects, thus improving the leakage current characteristicsand the reliability of the MTO.

After the formation of the tunnel oxide layer 120, a nitride layer 130,which acts as a memory (storage) layer, is formed on the tunnel oxidelayer 120. The nitride layer 130 may be formed by nitrifying the tunneloxide layer 120 or using LPCVD. A blocking oxide layer 140 is formed onthe nitride layer 130 to prevent loss of stored charges. The blockingoxide layer 140 may be formed by thermally oxidizing the nitride layer130.

Referring to FIG. 6, a polyslicon gate conductive layer 150 is formed onthe blocking oxide layer 140. The interface between the polysilicon gateconductive layer 150 and the blocking oxide layer 140, above each of theisolation regions 115 a, is lower than the upper surface of thesemiconductor substrate 110. Deposition of the polysilicon gateconductive layer 150 may be performed at temperature of about 500-700°C. using LPCVD. The polysilicon gate conductive layer 150 may be formedby first depositing a polysilicon layer, which is not doped withimpurities, on the resultant structure of FIG. 5 and ion-implantingarsenic (Ar) or phosphorous (P) into the polysilicon layer so as to makethe polysilicon layer conductive. Alternatively, the polysilicon gateconductive layer 150 may be made by doping polysilicon with impuritiesand depositing the impurity-doped polysilicon on the blocking oxidelayer 140 by using an in-situ process.

As shown in FIG. 6, an EEPROM according to an embodiment of the presentinvention comprises the isolation regions 115 a that are formed lowerthan the upper surface of the semiconductor substrate 110, the tunneloxide layer 120 covering the upper surfaces of the isolation regions 115a and the semiconductor substrate 110 that protrudes between the uppersurfaces of the isolation regions 115 a, the nitride layer 130 formed onthe tunnel oxide layer 120, the blocking oxide layer 140 formed on thenitride layer 130, and the polysilicon gate conductive layer 150 formedon the blocking oxide layer 140. The interface between the polysilicongate conductive layer 150 and the blocking oxide layer 140, above theisolation regions 115 a, is lower than the upper surface of thesemiconductor substrate 110.

A SONOS-type EEPROM according to an embodiment of the present inventioncomprises an active region, which has a 2D layout substantially similarto a conventional SONOS-type EEPROM and a 3D structure, which increasesan effective channel width of the active area. The active regioncomprises both the upper surface and the sidewalls of a protrusion ofthe semiconductor substrate 110 between the isolation regions 115 a.

FIG. 7 is a magnified view of the region B of FIG. 6. Referring to FIG.7, additional storage capacity D is realized along the sidewalls of aprotrusion of the semiconductor substrate 110, thereby increasing theeffective width of the active region without changing the cell layout.The formation of the additional storage facilities D results in theformation of an additional channel C along a portion of thesemiconductor substrate 110. As a result, it is possible to enhance theprogramming and erasing efficiencies, and reduce the amount of cellcurrent needed when reading information stored in the memory cell. Dueto an increase in the performance of the memory cell, the memory cellcan be made smaller, while achieving at least the same level ofperformance as compared to a larger conventional memory cell, therebyincreasing the integration of the memory. An active region of an EEPROMaccording to the present invention is a three-dimensional (3D) regionhaving more area than a planar active region of a conventional EEPROMhaving a substantially similar 2D layout. Accordingly, a high-densityand highly integrated EEPROM can be fabricated in which devices areeffectively separated from one another.

FIGS. 8 and 9 are cross-sectional views illustrating a method offabricating a SONOS-type EEPROM according to an embodiment of thepresent invention.

Referring to FIG. 8, from the structure shown in FIG. 4, edge portionsof a semiconductor substrate 110, which protrude above isolation regions115 a, are rounded to form round edges E.

The round edges E may be formed by etching the edge portions using amixture of NH₄OH, H₂O₂, and H₂O. Angular edges are etched at a higherrate by this mixture than round portions, and thus the angular edgesbecome rounded without substantially affecting other structures. NH₄OH,H₂O₂, and H₂O may be mixed at a ratio between about 1:1:5 and 1:4:100 ata temperature of about 50-75° C. to form the mixture.

Alternatively, the round edges E may be made by oxidizing the angularedges and removing the oxidized portions of the edges. The structure ofFIG. 4 is exposed to an atmosphere comprising oxygen to oxidize theexposed portions of the semiconductor substrate 110. In particular, theangular edges are easily oxidized as compared to other structures. Anoxide layer covering the angular edges forms a round interface with thesemiconductor substrate 110. The oxide layer on the edges is wet-etchedusing an HF solution and removed to expose round edges E.

Referring to FIG. 9, a tunnel oxide layer 120 is formed to cover theisolation regions 115 a and the protrusion of the semiconductorsubstrate 110 between the isolation regions 115 a. A nitride layer 130,a blocking oxide layer 140, and a polysilicon gate conductive layer 150are sequentially formed on the tunnel oxide layer 120.

The round edges E prevent the concentration of an electric field aroundthe edges of the protrusion, thereby avoiding degradation of the tunneloxide layer 120.

A silicide layer 155 is formed over the polysilicon gate conductivelayer 150. The silicide layer 155 may be a cobalt silicide layer, atungsten silicide layer, or a titanium silicide layer. The silicidelayer 155 is formed by depositing a metal layer of cobalt, tungsten, ortitanium on the polysilicon gate conductive layer 150 and performing athermal treatment, such as rapid thermal annealing (RTA), on the metallayer. During RTA, the deposited metal layer reacts with silicon in thepolysilicon gate conductive layer 150 to form the silicide layer 155.Portions of the metal layer that do not react with the silicon arecleaned and removed. The silicide layer 155 has a lower resistance thanthe polysilicon gate conductive layer 150 and thus increases anoperating speed of devices.

As described above, an EEPROM according to the present inventioncomprises trench isolation regions that are recessed compared to anupper surface of a semiconductor substrate, thus increasing an area ofan active region to range from the upper surface of the semiconductorsubstrate to the side of a protrusion between the isolation regions.Thus, an active channel region can be broadened without needing tochange the size of a planar unit cell, thus increasing the efficiency ofprogramming the memory and erasing information from the memory.

According to the present invention, the performance of a cell can beincreased and the size of the memory cell can be reduced. Therefore, itis possible to manufacture a highly-integrated EEPROM having a higherpacking density.

1. A method of fabricating an a non-volatile memory, comprising:defining an active region and an inactive region in a semiconductorsubstrate; forming trench isolation regions in the inactive region forincreasing an area of the active region from an upper surface of aprotrusion of the semiconductor substrate between the trench isolationregions to a side of the protrusion, wherein upper surfaces of thetrench isolation regions are lower than an upper surface of thesemiconductor substrate; forming a tunnel insulating layer on theprotrusion of the semiconductor substrate, including the side of theprotrusion; forming, sequentially, a storage layer, a blockinginsulating layer, and a gate layer on the tunnel insulating layer; androunding angular edges of the protrusion after increasing the area ofthe active region, wherein the edges formed between the trench isolationregions and the protrusions remain angular.
 2. The method of claim 1,wherein forming the trench isolation regions comprises: forming thetrench isolation regions in the inactive region, the upper surfaces ofthe trench isolation regions being at the same level as the surface ofthe semiconductor substrate; and etching the isolation regions to apredetermined thickness, wherein the trench isolation regions arerecessed in the semiconductor substrate.
 3. The method of claim 2,wherein the etching of the isolation regions is performed by wet etchback using HF.
 4. The method of claim 1, wherein rounding the angularedges comprises etching the angular edges of the protrusion using amixture of NH₄OH, H₂O₂, and H₂₀.
 5. The method of claim 1, whereinrounding the angular edges comprises: oxidizing the angular edges of theprotrusion; and removing oxidized portions of the edges of theprotrusion.
 6. The method of claim 1, wherein forming the tunnelinsulating layer comprises: forming an insulating layer usinglow-pressure chemical vapor deposition (LPCVD); and annealing theinsulating layer, wherein the annealing process is performed at anatmosphere comprising N₂O, NO, or a mixture of N₂O and NO.
 7. The methodof claim 1, wherein the storage layer is formed by one of nitrifying thetunnel insulating layer and using LPCVD.
 8. The method of claim 1,further comprising forming one of a cobalt silicide layer, a tungstensilicide layer, and a titanium silicide layer after forming thepolysilicon gate conductive layer.
 9. The method of claim 1, whereinforming the tunnel insulating layer further comprises forming the tunnelinsulating layer on the isolation regions.
 10. The method of claim 1,the storage layer is an insulating memory storage layer.
 11. A method offabricating an a non-volatile memory, comprising: forming trenchisolation regions in an inactive region of a semiconductor substrate,adjacent trench isolation regions defining respective protrusions havingrounded edges therebetween, wherein upper surfaces of the trenchisolation regions are lower than an upper surface of the semiconductorsubstrate and wherein the protrusions define an active region; forming atunnel insulating layer covering the protrusion of the semiconductorsubstrate; and forming, sequentially, a storage layer, a blockinginsulating layer, and a gate layer covering the tunnel insulating layer.12. The method of claim 11, wherein edges of the trench isolationregions formed below the upper surface of the trench isolation regionsremain angular.
 13. The method of claim 11, wherein forming the trenchisolation regions comprises: forming the trench isolation regions in theinactive region, the upper surfaces of the trench isolation regionsbeing at the same level as the surface of the semiconductor substrate;and etching the isolation regions to a predetermined thickness, whereinthe trench isolation regions are recessed in the semiconductorsubstrate.
 14. The method of claim 13, wherein the etching of theisolation regions is performed by wet etch back using HF.
 15. The methodof claim 11, further comprising forming the rounded edges of theprotrusion by etching the edges of the protrusion using a mixture ofNH₄OH, H₂O₂, and H₂₀.
 16. The method of claim 11, further comprisingforming the rounded edges of the protrusion comprising: oxidizing theedges of the protrusion; and removing oxidized portions of the edges ofthe protrusion.
 17. The method of claim 11, wherein forming the tunnelinsulating layer comprises: forming an oxide layer using low-pressurechemical vapor deposition (LPCVD); and annealing the oxide layer,wherein the annealing process is performed at an atmosphere comprisingN₂O, NO, or a mixture of N₂O and NO.
 18. The method of claim 11, whereinthe storage layer is formed by one of nitrifying the tunnel insulatinglayer and using LPCVD.
 19. The method of claim 11, further comprisingforming one of a cobalt silicide layer, a tungsten silicide layer, and atitanium silicide layer after forming the polysilicon gate conductivelayer.
 20. The method of claim 11, wherein the tunnel insulating layeris further formed on the side of the protrusion.
 21. The method of claim11, wherein forming the tunnel insulating layer further comprisesforming the tunnel insulating layer on the isolation regions.
 22. Themethod of claim 11, the storage layer is an insulating memory storagelayer.